Dimension Tolerance

(W±0.1mm)*H±(0.1mm)*(L+0.2mm/ -0.1mm)

Flatness

<λ/8@633nm

Scratch/ Dig Code

Better than 10/5 scracth/dig per MIL-O-13830A

Parallelism

<20 arc sec

Perpendicularity

<5 arc sec

Wavefront Distortion

<λ/8@633nm

Clear Aperture

>90% central area

Coating

Anti-reflective@1064nm, r<0.1%